直線馬達，直線馬達，直線馬達，直線感應馬達-bozhidacn.com
XYZ AOI inspection stage and Its Principle
隨著積體電路板上元件數量的增加和單一元件變得更小, 對檢測速度和效率的需求不斷增長. 興趣區 (自動光學檢測) 使用光學成像系統進行自動檢測. The core technology lies in obtaining accurate and high-quality optical images and processing them. Customized AOI solutions are widely applied, not only for PCB panel inspections but also in various other scenarios, 例如半導體的檢查, 電池產品, 和電子元件.
Features and Advantages of the XYZ AOI inspection stage
1.XYZ Stacked Structure: 採用空心杯直線馬達直接驅動控制, 消除齒槽效應並確保低速平穩運行 (minimalspeed fluctuation).
2.High-Precision Non-Contact Grating Scale: Provides excellent dynamic performance, 定位精度, 和重複性, resulting in stable motion andconsistent force distribution.
3.XY Axis Layered Structure: Built with a marble base for high stability; the Z-axis features a direct drive vertical lift structure for direct load movement. It includes abuilt-in balance cylinder with a travel range of 10mm.
技術參數
| 技術參數 | |||
| 軸向 | X軸 | Y軸 | Z軸 |
| 馬達型號 | BZDU-30B-3 | BZDU-30B-3（双动子） | – |
| 持續推力 | 153 氮 | 153 氮 | 23 氮 |
| 峰值推力 | 884 氮 | 884 氮 | 170 氮 |
| 連續電流 | 2.54 武器 | 2.54 武器 | – |
| 峰值電流 | 8.84 武器 | 8.84 武器 | – |
| 有效行程 | 500 毫米 | 400 毫米 | 10 毫米 |
| 載入 | Z軸 +5.5 公斤 | Z-axis +X-axis +5.5 公斤 | 5.5 公斤 |
| 最大速度 | 600 mm/s | 600 mm/s | 100 mm/s |
| Operating Speed | 200 mm/s | 100 mm/s | 100 mm/s |
| Vertical straightness | ±2微米 | ±2微米 | ±2微米 |
| 加速 | 0.6 克 | 0.6 克 | 0.3 克 |
| 重複精度 | ±1微米 | ±1微米 | ±1微米 |
| 定位精度 | ±2微米 | ±2微米 | ±2微米 |
| Horizontal straightness | ±2微米 | ±2微米 | ±2微米 |
| PITCH | ±5 arc sec | ±5 arc sec | – |
| YAW | ±5 arc sec | ±5 arc sec | – |
| Orthogonality | ±5 arc sec | ||
| Z-axis Response Frequency | 3um@ 230nm@50Hz | ||
| 安裝方法 | 水平的 | ||
應用
This high-precision three-axis motion platform, featuring a stacked three-axis structure, can be used in industrial projects that require high accuracy and efficiency, such as laser processing, optical manufacturing, 和檢查.
產品特點:
1.Three-Axis Direct Drive Structure Design: Ensures precise control and movement.
2.Z-Axis Direct Drive Vertical Lift Structure: Facilitates efficient vertical motion.
3.Built-In Pneumatic Balancing Configuration for Z-Axis: Supports a maximum load of 10 公斤.
4.XY軸高精度直線導軌: Provides excellent motion stability; Z-Axis features anti-creep crossed roller guides.
5.Granite Base for XY Axis: Offers high stability and durability.
6.Customizable Options: Configurations, travel range, 負載能力, 並可客製化特殊結構以滿足客戶需求.
