直線馬達，直線馬達，直線馬達，直線感應馬達-bozhidacn.com
Superimposed air-bearing stage and Its Principle
Superimposed air-bearing stage is a suspension system that uses gas as the medium, utilizing the lift generated by gas flow to support and suspend objects, 實現非接觸懸浮效果.
原理是將壓縮空氣或氮氣注入平面界面. The flow of gas and the formation of an air film create lift that supports the suspended object, forming a layer of gas suspension. This enables the suspension of the object, facilitating precise alignment and positioning.
Characteristics and Advantages of Superimposed air-bearing stage
1.Utilizes air elastic potential energy as a supporting guide, achieving zero friction between the guide rails and the sliding table.
2.Offers excellent dynamic performance and positioning accuracy.
3.Features a positive and negative pressure design for the air bearing platform.
4.In applications with large volume loads that have uneven gravitational distribution on the air bearing guide, it ensures better maintenance of the normal air gap in the guide.
技術參數
| 技術參數 | ||
| 中風 | 300mm*300mm | |
| 定位精度 | ±0.3 μm | |
| 雙向重複性 | ±0.2 μm | |
| 瀝青 | ±3角秒 | |
| Yaw | ±3角秒 | |
| Roll | ±3角秒 | |
| 直線度 | ±1 μm | |
| 平整度 | ±1 μm | |
| Resolution | 1nm | |
| Maximum acceleration | 2 克 | |
| Maximum speed | 1000 mm/s | |
| Maximum Horizontal Load | 60 公斤 | |
| Maximum Radial Load | 30 公斤 | |
| 持續推力 | Upper Axis | 78 氮 |
| Lower Axis | 156 氮 | |
| 峰值推力 | Upper Axis | 432 氮 |
| Lower Axis | 864 氮 | |
| In-position Stability | ±10 nm | |
| Operating Air Pressure | 5.5 bar(Recommended: dry air, water and oil filtration, dust filtered to below 0.5μm) | |
| Plateform Mass | 75公斤 | |
| Plateform Material | Aluminum | |
| MTBF | 25000Hours | |
| Note: The above test data were obtained in a laboratory environment, with the test points located 25 mm above the center point, as determined by a linear amplifier. | ||
應用
large optical lens inspection, wafer defect inspection in the semiconductor field, 精確
manufacturing, and packaging
產品特點:
1.High-performance direct-drive air bearing platform with high dynamic performance.
2.Utilizes an air surround preload and a non-contact design.
3.Designed specifically for high-performance scanning and inspection applications.
4.Provides nano-level positioning accuracy.
5.Driven by dual-stator linear motors.
6.Can be used as a single-axis platform or integrated with other axes to form a multi-axis system.
7.Highly suitable for heavy load applications.
8.Customizable for larger travel ranges.
