リニアモーター，リニアモーター，リニア電気モーター，リニア誘導モーター-bozhidacn.com
Superimposed air-bearing stage and Its Principle
Superimposed air-bearing stage is a suspension system that uses gas as the medium, utilizing the lift generated by gas flow to support and suspend objects, achieving a contactless suspension effect.
The principle involves injecting compressed air or nitrogen onto a planar interface. The flow of gas and the formation of an air film create lift that supports the suspended object, forming a layer of gas suspension. This enables the suspension of the object, facilitating precise alignment and positioning.
Characteristics and Advantages of Superimposed air-bearing stage
1.Utilizes air elastic potential energy as a supporting guide, achieving zero friction between the guide rails and the sliding table.
2.Offers excellent dynamic performance and positioning accuracy.
3.Features a positive and negative pressure design for the air bearing platform.
4.In applications with large volume loads that have uneven gravitational distribution on the air bearing guide, it ensures better maintenance of the normal air gap in the guide.
Technical Parameters
| Technical Parameters | ||
| 脳卒中 | 300mm*300mm | |
| 位置決め精度 | ±0.3 μm | |
| Bidirectional Repeatability | ±0.2 μm | |
| ピッチ | ±3 arc sec | |
| ヨー | ±3 arc sec | |
| ロール | ±3 arc sec | |
| straightness | ±1 μm | |
| flatness | ±1 μm | |
| 解決 | 1nm | |
| Maximum acceleration | 2 g | |
| Maximum speed | 1000 mm/s | |
| Maximum Horizontal Load | 60 kg | |
| Maximum Radial Load | 30 kg | |
| 連続推力 | Upper Axis | 78 N |
| Lower Axis | 156 N | |
| ピーク推力 | Upper Axis | 432 N |
| Lower Axis | 864 N | |
| In-position Stability | ±10 nm | |
| Operating Air Pressure | 5.5 bar(Recommended: dry air, water and oil filtration, dust filtered to below 0.5μm) | |
| プレートフォーム質量 | 75kg | |
| プレートフォーム材料 | アルミニウム | |
| mtbf | 25000時間 | |
| 注記: 上記のテストデータは、実験室環境で取得されました, テストポイントが配置されています 25 中心点の上のmm, 線形アンプによって決定されます. | ||
応用
large optical lens inspection, wafer defect inspection in the semiconductor field, precision
manufacturing, and packaging
製品の特徴:
1.High-performance direct-drive air bearing platform with high dynamic performance.
2.Utilizes an air surround preload and a non-contact design.
3.Designed specifically for high-performance scanning and inspection applications.
4.Provides nano-level positioning accuracy.
5.Driven by dual-stator linear motors.
6.Can be used as a single-axis platform or integrated with other axes to form a multi-axis system.
7.Highly suitable for heavy load applications.
8.Customizable for larger travel ranges.
