Fixation-girder stage and Its Principle
The fixation-girder stage features high dynamic profiling capabilities and ultra-precision positioning accuracy. Equipped with a core linear motor and advanced control technology, it can accurately replicate complex shapes and contours within a very short time. Whether dealing with smooth curves or sharp edges, this stage processes with remarkable precision, significantly improving manufacturing efficiency and product quality.
Features and Advantages of the fixation-girder stage
1.High Precision and Stability: Resistant to deformation, offering excellent stability and accuracy.
2.Uniform Structure: Extremely low coefficient of thermal expansion and completely eliminated internal stress, ensuring long-lasting precision.
3.Superior Physical Properties: High rigidity, hardness, and wear resistance.
4.Corrosion Resistance: Impervious to acid and alkaline liquids, will not rust, does not require oiling, and is resistant to dust accumulation. Easy maintenance and long service life.
5.Temperature Independence: Maintains measurement accuracy even at room temperature without the need for constant temperature control.
6.Non-Magnetic: Allows smooth, frictionless movement during measurements and is unaffected by humidity, ensuring excellent surface stability.
技術參數
技術參數 | |||
Plateform Model | BZDDM-DLXY-400-400-100 | BZDDM-DLXY-600-600-100 | BZDDM-DLXY-800-800-100 |
有效行程 | 400*400*100 | 600*600*100 | 800*800*100 |
定位精度 | ±2微米 | ±2微米 | ±2微米 |
Bidirectional Repetitive 定位精度 | ±1微米 | ±1微米 | ±1微米 |
瀝青 | 15 弧秒 | 20 弧秒 | 25 弧秒 |
Yaw | 15 弧秒 | 20 弧秒 | 25 弧秒 |
Roll | 15 弧秒 | 20 弧秒 | 25 弧秒 |
Straightness | ±3 um | ±5微米 | ±8微米 |
Resolution | 100 nm | 100 nm | 100 nm |
Maximum Acceleration | 1g | 1克 | 1g |
最大速度 | 1 m/s | 1 多發性硬化症 | 1 m/s |
Y-axis load | 60 KG | 60 KG | 60 KG |
Z-axis load | 12 KG | 12 KG | 12 KG |
Continuous Thrust Y-axis | 221 N | 221 氮 | 221 N |
Continuous Thrust Z-axis | 393 N | 393 氮 | 393 N |
Peak Thrust Y-axis | 1248 N | 1248 氮 | 1248 N |
Peak Thrust Z-axis | 2830 N | 2830 氮 | 2830 N |
Minimum Step Size | 500 nm | 500 nm | 500 nm |
Plateform Mass | 1400 公斤 | 1500 公斤 | 1700 公斤 |
Plateform Material | Granite | 花崗岩 | Granite |
MTBF | 20000 Hours | 20000 Hours | 20000 Hours |
Note: The above test data were obtained in a laboratory environment, with the test points located 25 mm above the center point, as determined by a linear amplifier. |
應用
The fixation-girder stage meets the modern precision manufacturing demands for high accuracy and efficiency. It is widely used in fields such as semiconductor manufacturing, precision mechanical processing, and optical instrument manufacturing.
產品特點:
1.Coreless Linear Motor Control: Ensures smooth and efficient operation.
2.High Load Capacity, 高精度, Long Travel, and High Rigidity: Designed for demanding applications.
3.Precision Platform with Dust Protection: Maintains performance in challenging environments.
4.Centralized Lubrication and Metal Grounding: For enhanced reliability and safety.
5.Quick Connect and Disconnect: Allows users to install and debug quickly.
6.Customizable Travel Range: Can be tailored to specific requirements.