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Linear motors play a crucial role in semiconductor equipment. 첫째로, they offer high-speed and high-precision capabilities, meeting the stringent positioning and motion control requirements in semiconductor machinery, thus enhancing production efficiency and machining accuracy. 둘째, linear motors eliminate the need for transmission components, resulting in lower noise, vibration, and higher sensitivity, thereby reducing energy consumption and maintenance costs during equipment operation. 추가적으로, linear motors exhibit excellent dynamic characteristics and response speeds, enabling quick adaptation to changing demands on the production line, thereby enhancing equipment flexibility and adaptability. 전반적인, the application of linear motors has significantly improved semiconductor equipment in terms of production efficiency, machining precision, energy consumption, and flexibility, thus fostering the development of the semiconductor industry.

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