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XYZ AOI inspection stage and Its Principle
As the number of components on integrated circuit boards increases and individual components become smaller, the demands for detection speed and efficiency grow. AOI (Automated Optical Inspection) uses an optical imaging system for automatic detection. The core technology lies in obtaining accurate and high-quality optical images and processing them. Customized AOI solutions are widely applied, not only for PCB panel inspections but also in various other scenarios, such as the inspection of semiconductors, battery products, and electronic components.
Features and Advantages of the XYZ AOI inspection stage
1.XYZ Stacked Structure: Utilizes coreless linear motor direct drive control, eliminating cogging effects and ensuring smooth operation at low speeds (minimalspeed fluctuation).
2.High-Precision Non-Contact Grating Scale: Provides excellent dynamic performance, positioning accuracy, and repeatability, resulting in stable motion andconsistent force distribution.
3.XY Axis Layered Structure: Built with a marble base for high stability; the Z-axis features a direct drive vertical lift structure for direct load movement. It includes abuilt-in balance cylinder with a travel range of 10mm.
Technical parameters
| Technical parameters | |||
| Axial | X-axis | Y-axis | Z-axis |
| Motor Model | BZDU-30B-3 | BZDU-30B-3（双动子） | – |
| Continuous Thrust | 153 N | 153 N | 23 N |
| Peak Thrust | 884 N | 884 N | 170 N |
| Continuous Current | 2.54 Arms | 2.54 Arms | – |
| Peak Current | 8.84 Arms | 8.84 Arms | – |
| Effective Stroke | 500 mm | 400 mm | 10 mm |
| Load | Z-axis +5.5 kg | Z-axis +X-axis +5.5 kg | 5.5 kg |
| Maximum Speed | 600 mm/s | 600 mm/s | 100 mm/s |
| Operating Speed | 200 mm/s | 100 mm/s | 100 mm/s |
| Vertical straightness | ±2 um | ±2 um | ±2 um |
| Acceleration | 0.6 g | 0.6 g | 0.3 g |
| Repeat accuracy | ±1 um | ±1 um | ±1 um |
| Positioning Accuracy | ±2 um | ±2 um | ±2 um |
| Horizontal straightness | ±2 um | ±2 um | ±2 um |
| PITCH | ±5 arc sec | ±5 arc sec | – |
| YAW | ±5 arc sec | ±5 arc sec | – |
| Orthogonality | ±5 arc sec | ||
| Z-axis Response Frequency | 3um@ 230nm@50Hz | ||
| Installation Method | Horizontal | ||
Application
This high-precision three-axis motion platform, featuring a stacked three-axis structure, can be used in industrial projects that require high accuracy and efficiency, such as laser processing, optical manufacturing, and inspection.
Product Features:
1.Three-Axis Direct Drive Structure Design: Ensures precise control and movement.
2.Z-Axis Direct Drive Vertical Lift Structure: Facilitates efficient vertical motion.
3.Built-In Pneumatic Balancing Configuration for Z-Axis: Supports a maximum load of 10 kg.
4.High-Precision Linear Guides for XY Axis: Provides excellent motion stability; Z-Axis features anti-creep crossed roller guides.
5.Granite Base for XY Axis: Offers high stability and durability.
6.Customizable Options: Configurations, travel range, load capacity, and special structures can be tailored to meet customer needs.
